Sputtering Calculations with the Discrete-Ordinates Method

The purpose of this work is to investigate the applicability of the discrete-ordinates (S_N) method to light ion sputtering problems. In particular, the neutral particle discrete-ordinates computer code, ANISN, is used to calculate sputtering yields. No modifications to this code are necessary to treat charged particle transport. However, a cross-section processing code is needed for the generation of multigroup cross sections; these cross sections include a modifi