Physical and Chemical Sputtering of Multicomponent Solids

Wolfgang Eckstein; Joachim Roth; Eric Gauthier; J&aacute;nos L&aacute;szl&oacute;

doi:dx.doi.org/10.13182/FST91-A29342

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Home / Publications / Journals / Fusion Science and Technology / Volume 19 / Number 4

Physical and Chemical Sputtering of Multicomponent Solids

Wolfgang Eckstein, Joachim Roth, Eric Gauthier, János László

Fusion Science and Technology / Volume 19 / Number 4 / July 1991 / Pages 2076-2082

Technical Paper / Carbon Material Special / dx.doi.org/10.13182/FST91-A29342

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The bombardment of beryllium by carbon is investigated by a dynamic Monte Carlo simulation to demonstrate the complicated nature of this type of simple system by considering only collisional effects. Furthermore, the sputtering yield dependence on the incident angle is investigated for O-BeO, Be-Be, and C-Be systems at 3 keV. Experimental data on the influence of boron in carbon targets on the sputtering yield for bombardment by 1-keV deuterium are provided.