Computer Simulation of Reflection of and Sputtering by Plasma Particles

The SEISM Monte Carlo code, which is similar to the well-known TRIM code, is applied to plasma particles; Maxwellian energy and isotropic angle distribution is assumed for the plasma particles. The effects of plasma and monoenergetic particle (deuterium) bombardment on a solid (nickel), i.e., sputtering, particle and energy reflection, implantation, etc., in the 0.1- to 10-keV energy and ion temperature range are compared. Also, the effect of the sheath potential at 100-eV ion temperature is investigated.