Development of "Punching-Out Target" to Generate Extreme Ultraviolet (EUV) Light

Yuzuri Yasuda; Keiji Nagai; Takayoshi Norimatsu; Shinsuke Fujioka; Hiroaki Nishimura; Katsunobu Nishihara; Yasukazu Izawa; Kunioki Mima

doi:dx.doi.org/10.13182/FST07-A1476

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Home / Publications / Journals / Fusion Science and Technology / Volume 51 / Number 4

Development of "Punching-Out Target" to Generate Extreme Ultraviolet (EUV) Light

Yuzuri Yasuda, Keiji Nagai, Takayoshi Norimatsu, Shinsuke Fujioka, Hiroaki Nishimura, Katsunobu Nishihara, Yasukazu Izawa, Kunioki Mima

Fusion Science and Technology / Volume 51 / Number 4 / May 2007 / Pages 769-771

Technical Paper / dx.doi.org/10.13182/FST07-A1476

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Several hundred tin dots with controlled size were easily fabricated on transparency film by using an inkjet printer with SnSO4 solution. A surface treatment using Tween 20 as the surfactant was necessary. The SnSO₄ was reduced to metallic tin with NaBH₄. The thickness of metallic tin was 25 nm for one throughput.