Monolithic and Low-Density (<50 mg/cm³) Metal Oxides Fabricated Using Electrospinning: Vanadium Oxide and Copper Oxide Examples

This paper introduces examples of low-density (<50 mg/cm³) metal oxide targets using the electrospinning technique. Millimeter-sized targets of vanadium oxide and copper oxide were fabricated successfully. Low-density materials give well-controlled low-density plasma to produce an optically thin plasma. The advantage of the electrospinning sol-gel method is that the microstructure of the metal oxide fiber sheet can be designed and fabricated to meet the demand of the target in a very convenient way with mass production. The obtained low-density metal oxide can be used for the laser target to generate extreme ultraviolet light and X-rays.